STUDIES ON GLOW-DISCHARGE POLYMERIZATION OF TETRAMETHYSILANE .1. SOME PHYSICAL-PROPERTIES OF POLYMERS OBTAINED BY GLOW-DISCHARGE POLYMERIZATION OF TETRAMETHYLSILANE AND HEXAMETHYLDISILAZANE

被引:15
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INAGAKI, N
CHEN, KS
KADONOME, N
KATSUURA, K
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10.1295/koron.38.665
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O63 [高分子化学(高聚物)];
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070305 ; 080501 ; 081704 ;
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页码:665 / 672
页数:8
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