THE ANNEALING OF HELIUM-INDUCED CAVITIES IN SILICON AND THE INHIBITING ROLE OF OXYGEN

被引：61

作者：

EVANS, JH ^{[1
]}

VANVEEN, A ^{[1
]}

GRIFFIOEN, CC ^{[1
]}

机构：

[1] DELFT UNIV TECHNOL,INST INTERUNIV REACTOR,NL-2629 JB DELFT,NETHERLANDS

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 28卷 / 03期

关键词：

D O I：

10.1016/0168-583X(87)90176-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：360 / 363

页数：4

共 24 条

[1] LOW-ENERGY (2-5 KEV) ARGON DAMAGE IN SILICON
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[2] DEPENDENCE OF RESIDUAL DAMAGE ON TEMPERATURE DURING AR+ SPUTTER CLEANING OF SILICON
BEAN, JC
BECKER, GE
PETROFF, PM
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[J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (03) : 907 - 913
[3] COMPARATIVE-STUDY OF ANNEALED NEON-ION, ARGON-ION, AND KRYPTON-ION IMPLANTATION DAMAGE IN SILICON
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[4] SOLID BUBBLE FORMATION IN TITANIUM INJECTED WITH KRYPTON IONS
EVANS, JH
MAZEY, DJ
[J]. JOURNAL OF NUCLEAR MATERIALS, 1986, 138 (2-3) : 176 - 184
[5] THE FORMATION OF HIGH-PRESSURE PRECIPITATION PHASES DURING THE IMPLANTATION OF INERT-GAS AND OTHER INSOLUBLE ATOM SPECIES IN METALS
EVANS, JH
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 18 (01) : 16 - 23
[6] ON THE KINETICS OF THERMAL DONORS IN OXYGEN-RICH SILICON IN THE RANGE FROM 450-DEGREES-C TO 900-DEGREES-C
GAWORZEWSKI, P
SCHMALZ, K
[J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1980, 58 (02): : K223 - K226
[7] HELIUM BUBBLE BEHAVIOR IN BCC METALS BELOW 0.65TM
GOODHEW, PJ
TYLER, SK
[J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 1981, 377 (1769): : 151 - &
[8] HELIUM DESORPTION PERMEATION FROM BUBBLES IN SILICON - A NOVEL METHOD OF VOID PRODUCTION
GRIFFIOEN, CC
EVANS, JH
DEJONG, PC
VANVEEN, A
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 27 (03) : 417 - 420
[9] THE GAS-BUBBLE SUPER-LATTICE AND THE DEVELOPMENT OF SURFACE-STRUCTURE IN HE+ AND H+ IRRADIATED METALS AT 300-K
JOHNSON, PB
MAZEY, DJ
[J]. JOURNAL OF NUCLEAR MATERIALS, 1980, 93-4 (OCT) : 721 - 727
[10] ORDERING OF VOIDS AND GAS-BUBBLES IN RADIATION ENVIRONMENTS
KRISHAN, K
[J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1982, 66 (3-4): : 121 - 155

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