DEPOSITION OF WIDE-AREA DIAMOND FILMS IN MAGNETO-MICROWAVE PLASMA

被引：9

作者：

HIRAKI, A

KAWARADA, H

MAR, KS

YOKOTA, Y

WEI, J

SUZUKI, J

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 37-8卷

关键词：

D O I：

10.1016/0168-583X(89)90301-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：799 / 806

页数：8

共 21 条

[1] DEAN PJ, 1965, PHYS REV A, V139, P588
[2] Deryagin BV., 1968, J CRYST GROWTH, V2, P380, DOI [10.1016/0022-0248(68)90033-X, DOI 10.1016/0022-0248(68)90033-X]
[3] SYNTHESIS OF DIAMOND THIN-FILMS BY THERMAL CVD USING ORGANIC-COMPOUNDS
HIROSE, Y
TERASAWA, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (06): : L519 - L521
[4] ITO K, 1988, CHEM LETT, V4, P588
[5] DIAMOND SYNTHESIS FROM GAS-PHASE IN MICROWAVE PLASMA
KAMO, M
SATO, Y
MATSUMOTO, S
SETAKA, N
[J]. JOURNAL OF CRYSTAL GROWTH, 1983, 62 (03) : 642 - 644
[6] LARGE AREA CHEMICAL VAPOR-DEPOSITION OF DIAMOND PARTICLES AND FILMS USING MAGNETOMICROWAVE PLASMA
KAWARADA, H
MAR, KS
HIRAKI, A
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (06): : L1032 - L1034
[7] BLUE AND GREEN CATHODOLUMINESCENCE OF SYNTHESIZED DIAMOND FILMS FORMED BY PLASMA-ASSISTED CHEMICAL VAPOR-DEPOSITION
KAWARADA, H
NISHIMURA, K
ITO, T
SUZUKI, J
MAR, KS
YOKOTA, Y
HIRAKI, A
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (04): : L683 - L686
[8] ABSORPTION OF ELECTROMAGNETIC-WAVES IN A RADIALLY INHOMOGENEOUS PLASMA AT HIGH MAGNETIC-FIELDS
KOPECKY, V
MUSIL, J
ZACEK, F
[J]. PLASMA PHYSICS AND CONTROLLED FUSION, 1975, 17 (12) : 1147 - &
[9] HIGH-RATE SYNTHESIS OF DIAMOND BY DC PLASMA-JET CHEMICAL VAPOR-DEPOSITION
KURIHARA, K
SASAKI, K
KAWARADA, M
KOSHINO, N
[J]. APPLIED PHYSICS LETTERS, 1988, 52 (06) : 437 - 438
[10] THE EFFECT OF MAGNETIC FIELD ON THE BREAKDOWN OF GASES AT MICROWAVE FREQUENCIES
LAX, B
ALLIS, WP
BROWN, SC
[J]. JOURNAL OF APPLIED PHYSICS, 1950, 21 (12) : 1297 - 1304

← 1 2 3 →