PREPARATION OF DIAMOND FILMS BY AXIAL MAGNETRON SPUTTERING OF VITREOUS CARBON TARGET

被引：5

作者：

CHATTOPADHYAY, KK

DUTTA, J

CHAUDHURI, S

PAL, AK

机构：

[1] Department of Materials Science, Indian Association for the Cultivation of Science, Calcutta

来源：

MATERIALS LETTERS | 1993年 / 16卷 / 2-3期

关键词：

D O I：

10.1016/0167-577X(93)90040-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond and diamond-like carbon thin films were prepared by sputtering of vitreous carbon discs in an argon+hydrogen plasma by using an axial magnetron sputtering technique. The films were characterised by measuring electrical, optical and microstructural properties.

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页码：145 / 149

页数：5

相关论文

共 9 条

[1] BANDGAP AND OPTICAL-TRANSITIONS IN THIN-FILMS FROM REFLECTANCE MEASUREMENTS [J].

BHATTACHARYYA, D ;

CHAUDHURI, S ;

PAL, AK .

VACUUM, 1992, 43 (04) :313-316

[2] DEPOSITION OF SMOOTH, ORIENTED DIAMOND FILMS USING MICROWAVE PLASMA CHEMICAL VAPOR-DEPOSITION [J].

CELII, FG ;

WHITE, D ;

PURDES, AJ .

THIN SOLID FILMS, 1992, 212 (1-2) :140-149

[3]

GREENE JE, 1992, THIN SOLID FILMS, V212

[4] STRUCTURAL CHARACTERISTICS OF DIAMOND FILMS PREPARED BY THERMAL CHEMICAL VAPOR-DEPOSITION PROCESSES [J].

GUO, FS ;

YU, SC .

THIN SOLID FILMS, 1992, 212 (1-2) :133-136

[5] MASS DENSITY AND HYDROGEN CONCENTRATION IN DIAMOND-LIKE CARBON-FILMS - PROTON RECOIL, RUTHERFORD BACKSCATTERING AND ELLIPSOMETRIC ANALYSIS [J].

INGRAM, DC ;

WOOLLAM, JA ;

BUABBUD, G .

THIN SOLID FILMS, 1986, 137 (02) :225-230

[6]

LUX B, 1991, NATO ASI B, V266

[7] FROM DIAMOND-LIKE CARBON TO DIAMOND COATINGS [J].

MESSIER, R ;

BADZIAN, AR ;

BADZIAN, T ;

SPEAR, KE ;

BACHMANN, P ;

ROY, R .

THIN SOLID FILMS, 1987, 153 :1-9

[8]

Mott N. F., 1979, ELECT PROCESSES NONC, P221

[9] GROWTH OF DIAMOND THIN-FILMS BY ELECTRON-ASSISTED CHEMICAL VAPOR-DEPOSITION AND THEIR CHARACTERIZATION [J].

SAWABE, A ;

INUZUKA, T .

THIN SOLID FILMS, 1986, 137 (01) :89-99