DETECTION OF FAST DIFFUSING METAL IMPURITIES IN SILICON BY HAZE TEST AND BY MODULATED OPTICAL REFLECTANCE - A COMPARISON

被引：8

作者：

ALPERN, P

BERGHOLZ, W

KAKOSCHKE, R

机构：

来源：

关键词：

D O I：

10.1149/1.2096559

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：3841 / 3848

页数：8

共 13 条

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[8] ROSENCWAIG A, 1987, COMMUNICATION
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