STUDY OF INP-N PASSIVATION IN OXYGEN RF AND MULTIPOLAR PLASMAS

被引：3

作者：

BELMAHI, M ^{[1
]}

机构：

[1] ECOLE SUPER SCI & TECHNOL INGN NANCY,ELECTR & PHYS INTERFACES LAB,F-54500 VANDOEUVRE NANCY,FRANCE

来源：

REVUE DE PHYSIQUE APPLIQUEE | 1989年 / 24卷 / 03期

关键词：

D O I：

10.1051/rphysap:01989002403036900

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：369 / 374

页数：6

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