OXIDATION OF SILICON-CARBIDE IN A WET ATMOSPHERE

被引：78

作者：

MAEDA, M

NAKAMURA, K

OHKUBO, T

机构：

[1] Government Industrial Research Inst, Japan

来源：

JOURNAL OF MATERIALS SCIENCE | 1988年 / 23卷 / 11期

关键词：

D O I：

10.1007/BF01106816

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：3933 / 3938

页数：6

共 24 条

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