AG(+) IMPLANTATION IN AL2O3,LINBO3 AND QUARTZ

被引：10

作者：

RAHMANI, M

TOWNSEND, PD

机构：

来源：

VACUUM | 1989年 / 39卷 / 11-12期

关键词：

D O I：

10.1016/0042-207X(89)91112-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1157 / 1162

页数：6

共 25 条

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