LATERAL RESOLUTION OF SI INDUCED DISORDERING OF SUPERLATTICES

被引：2

作者：

DOBISZ, EA

MARRIAN, CRK

CRAIGHEAD, HG

SCHWARZ, SA

HARBISON, JP

机构：

[1] CORNELL UNIV,SCH APPL & ENGN PHYS,ITHACA,NY 14853

[2] BELLCORE,RED BANK,NJ 07701

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 06期

关键词：

D O I：

10.1116/1.584647

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：2053 / 2056

页数：4

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