PULSE INTENSE METAL-ION DIODE WITH A VACUUM-ARC PLASMA ANODE

被引:2
作者
NAKAGAWA, Y
机构
[1] Department of Electrical Engineering, Faculty of Engineering, Osaka City University, Sumiyoshi-ku, Osaka 558, Sugimoto
关键词
D O I
10.1109/27.125050
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
An intense pulsed ion beam of metal was extracted from a magnetically insulated ion diode operated in a mode of plasma prefill generated from a vacuum arc discharge, anode plasma source. With this ion diode, an intense metal-ion beam of a high melting-point metal (Ta) was obtained. A variety of operational modes appeared, depending on the amount of plasma in the diode gap at the initiation of the high-voltage pulse. The energy, current, and duration time of the ion beam were 20 approximately 100 keV, approximately 1 kA, and 1-mu-s, respectively. Measurements of ions were performed with an ion energy analyzer or a biased ion collector located at the end of a long drift tube and a Thomson parabola ion spectrometer. The Ta ions in the first to fifth states of ionization were detected accompanied by C+, O+, F+, and H+. A Ta ion beam current of about half the total ion flux was obtained in this experiment.
引用
收藏
页码:1267 / 1271
页数:5
相关论文
共 19 条
  • [1] ON THE CURRENT INTENSITY LIMIT OF A VACUUM-ARC ION-SOURCE
    BROWN, IG
    [J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 1987, 15 (04) : 346 - 350
  • [2] BROAD-BEAM MULTI-AMPERE METAL-ION SOURCE
    BROWN, IG
    GALVIN, JE
    MACGILL, RA
    PAOLONI, FJ
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (01) : 577 - 579
  • [3] VACUUM-ARC ARRAYS FOR INTENSE METAL-ION BEAM INJECTORS
    BURKHART, C
    COFFEY, S
    COOPER, G
    HUMPHRIES, S
    LEN, LK
    LOGAN, AD
    SAVAGE, M
    WOODALL, DM
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 10-1 (MAY) : 792 - 795
  • [4] BURKHART C, 1985, NUCL INSTRUM METH B, V11, P792
  • [5] PULSED ION-BEAM IRRADIATION OF SILICON
    CHU, WK
    MADER, SR
    GOREY, EF
    BAGLIN, JEE
    HODGSON, RT
    NERI, JM
    HAMMER, DA
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 194 (1-3): : 443 - 447
  • [6] DIDENKO AN, 1986, 6TH P INT C HIGH POW, P617
  • [7] EROKHIN GP, 1986, 6TH P INT C HIGH POW, P637
  • [8] MAGNETICALLY INSULATED ION DIODE WITH A GAS-BREAKDOWN PLASMA ANODE
    GREENLY, JB
    UEDA, M
    RONDEAU, GD
    HAMMER, DA
    [J]. JOURNAL OF APPLIED PHYSICS, 1988, 63 (06) : 1872 - 1876
  • [9] GREENLY JB, 1986, 6TH P INT C HIGH POW, P196
  • [10] PRODUCTION OF HIGH-CURRENT METAL-ION BEAMS
    HIRVONEN, JK
    CAROSELLA, CA
    HUBLER, GK
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 189 (01): : 103 - 106