THICK ZONE PLATE FABRICATION USING REACTIVE SPUTTER ETCHING

[1] CEGLIO, 1980, PHYS REV LETT, V44, P579

[2] ZONE-PLATE CODED IMAGING OF LASER-PRODUCED PLASMAS [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (04) : 1566 - 1569

[3] MICRO-FRESNEL ZONE PLATES FOR CODED IMAGING APPLICATIONS [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (01) : 15 - 20

[4] CIARLO D, 1980, MAR P SPIE S SEM MIC

[5] DEPENDENCE OF THE SURFACE-MORPHOLOGY OF COPPER COATED LASER FUSION-TARGETS ON THE DC SPUTTER SOURCE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (03): : 1249 - 1252

[6] PROFILE CONTROL BY REACTIVE SPUTTER ETCHING [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (02): : 319 - 326

[1] CEGLIO, 1980, PHYS REV LETT, V44, P579

[2] ZONE-PLATE CODED IMAGING OF LASER-PRODUCED PLASMAS [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (04) : 1566 - 1569

[3] MICRO-FRESNEL ZONE PLATES FOR CODED IMAGING APPLICATIONS [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (01) : 15 - 20

[4] CIARLO D, 1980, MAR P SPIE S SEM MIC

[5] DEPENDENCE OF THE SURFACE-MORPHOLOGY OF COPPER COATED LASER FUSION-TARGETS ON THE DC SPUTTER SOURCE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (03): : 1249 - 1252

[6] PROFILE CONTROL BY REACTIVE SPUTTER ETCHING [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (02): : 319 - 326