HIGH-FREQUENCY AND LOW-DISPERSION CHARACTERISTICS OF SURFACE ACOUSTIC-WAVES ON ALN-AL2O3

被引：12

作者：

TSUBOUCHI, K

SUGAI, K

MIKOSHIBA, N

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1980年 / 19卷 / 12期

关键词：

D O I：

10.1143/JJAP.19.L751

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L751 / L754

页数：4

共 9 条

[1]

Duffy M. T., 1973, Journal of Electronic Materials, V2, P359, DOI 10.1007/BF02666163

[2]

DUFFY MT, 1978, HETEROEPITAXIAL SEMI, pCH4

[3]

Kagiwada R. S., 1978, 1978 Ultrasonics Symposium Proceedings, P598, DOI 10.1109/ULTSYM.1978.197110

[4] USE OF METALORGANICS IN PREPARATION OF SEMICONDUCTOR MATERIALS .4. NITRIDES OF ALUMINUM AND GALLIUM [J].

MANASEVIT, HM ;

ERDMANN, FM ;

SIMPSON, WI .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (11) :1864-+

[5]

MORITA M, UNPUBLISHED

[6] LOW-TEMPERATURE GROWTH OF PIEZOELECTRIC AIN FILM BY RF REACTIVE PLANAR MAGNETRON SPUTTERING [J].

SHIOSAKI, T ;

YAMAMOTO, T ;

ODA, T ;

KAWABATA, A .

APPLIED PHYSICS LETTERS, 1980, 36 (08) :643-645

[7] RF-SPUTTERED ALUMINUM NITRIDE FILMS ON SAPPHIRE [J].

SHUSKUS, AJ ;

REEDER, TM ;

PARADIS, EL .

APPLIED PHYSICS LETTERS, 1974, 24 (04) :155-156

[8] ANALYSIS OF INTERDIGITAL SURFACE WAVE TRANSDUCER BY USE OF AN EQUIVALENT CIRCUIT MODEL [J].

SMITH, WR ;

GERARD, HM ;

COLLINS, JH ;

REEDER, TM ;

SHAW, HJ .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1969, MT17 (11) :856-+

[9]

TAKADA S, 1979, 2ND P M FERR MAT THE, P45

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