COMPOSITION AND THICKNESS OF SUB-MICRON METAL COATINGS AND MULTILAYERS ON SI DETERMINED BY EPMA

被引：25

作者：

WILLICH, P

OBERTOP, D

机构：

[1] Philips GmbH, Germany

来源：

SURFACE AND INTERFACE ANALYSIS | 1988年 / 13卷 / 01期

关键词：

D O I：

10.1002/sia.740130106

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：20 / 24

页数：5

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