ATOMIC-SCALE STRUCTURE OF CVD AMORPHOUS SI3N4-BN COMPOSITE

被引:14
作者
FUKUNAGA, T [1 ]
GOTO, T [1 ]
MISAWA, M [1 ]
HIRAI, T [1 ]
SUZUKI, K [1 ]
机构
[1] NATL LAB HIGH ENERGY PHYS,OHO,IBARAKI 305,JAPAN
关键词
D O I
10.1016/S0022-3093(87)80724-X
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:1119 / 1126
页数:8
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