ATOMIC-SCALE STRUCTURE OF CVD AMORPHOUS SI3N4-BN COMPOSITE

被引：14

作者：

FUKUNAGA, T ^{[1
]}

GOTO, T ^{[1
]}

MISAWA, M ^{[1
]}

HIRAI, T ^{[1
]}

SUZUKI, K ^{[1
]}

机构：

[1] NATL LAB HIGH ENERGY PHYS,OHO,IBARAKI 305,JAPAN

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1987年 / 95-6卷

关键词：

D O I：

10.1016/S0022-3093(87)80724-X

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：1119 / 1126

页数：8

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