BORON-HYDROGEN COMPLEXES IN CRYSTALLINE SILICON

被引:64
作者
HERRERO, CP [1 ]
STUTZMANN, M [1 ]
BREITSCHWERDT, A [1 ]
机构
[1] MAX PLANCK INST FESTKORPERFORSCH,W-7000 STUTTGART 80,GERMANY
来源
PHYSICAL REVIEW B | 1991年 / 43卷 / 02期
关键词
D O I
10.1103/PhysRevB.43.1555
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Boron-hydrogen complexes and the diffusion of hydrogen in boron-doped silicon are analyzed by means of Raman-scattering and infrared-reflection spectroscopies. At temperatures lower than 200-degrees-C, the hydrogen diffusion is controlled by a trapping at the acceptor sites, which becomes negligible at higher temperatures. Changes in the zone-center optical phonon of silicon and in the vibrational local modes of boron occur after hydrogen passivation. H and B local modes are studied as a function of temperature and external uniaxial stress. The analysis of the H-vibrational modes under stress reveals a nontrigonal symmetry of B-H complexes at 100 K, and a high mobility of hydrogen in these complexes. Our results are compared with different models proposed in the literature. We find that they are compatible with a "bond-minimum" site for hydrogen at low temperatures; however, under stress and at high temperatures, off-bond positions of H are proposed. We also analyze the stability of the boron-hydrogen complexes, and deduce a dissociation energy of 0.6 eV.
引用
收藏
页码:1555 / 1575
页数:21
相关论文
共 71 条
  • [11] PROTON DIFFUSION IN CRYSTALLINE SILICON
    BUDA, F
    CHIAROTTI, GL
    CAR, R
    PARRINELLO, M
    [J]. PHYSICAL REVIEW LETTERS, 1989, 63 (03) : 294 - 297
  • [12] CARDONA M, 1982, TOP APPL PHYS, V50, P19
  • [13] VIBRATIONAL-SPECTRA OF HYDROGEN IN SILICON AND GERMANIUM
    CARDONA, M
    [J]. PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1983, 118 (02): : 463 - 481
  • [14] STUDY OF THE LOCALIZED VIBRATIONS OF BORON IN HEAVILY DOPED SI
    CHANDRASEKHAR, M
    CHANDRASEKHAR, HR
    GRIMSDITCH, M
    CARDONA, M
    [J]. PHYSICAL REVIEW B, 1980, 22 (10): : 4825 - 4833
  • [15] THEORY OF HYDROGEN PASSIVATION OF SHALLOW-LEVEL DOPANTS IN CRYSTALLINE SILICON
    CHANG, KJ
    CHADI, DJ
    [J]. PHYSICAL REVIEW LETTERS, 1988, 60 (14) : 1422 - 1425
  • [16] CHEVALLIER J, 1988, ANNU REV MATER SCI, V18, P219
  • [17] PHYSICAL-PROPERTIES OF ION-IMPLANTED LASER ANNEALED NORMAL-TYPE GERMANIUM
    CONTRERAS, G
    TAPFER, L
    SOOD, AK
    CARDONA, M
    [J]. PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1985, 131 (02): : 475 - 487
  • [18] VIBRATIONAL-MODE THEORY OF ACCEPTOR-HYDROGEN COMPLEXES IN SILICON
    DASILVA, ECF
    ASSALI, LVC
    LEITE, JR
    DALPINO, A
    [J]. PHYSICAL REVIEW B, 1988, 37 (06): : 3113 - 3116
  • [19] STATE AND MOTION OF HYDROGEN IN CRYSTALLINE SILICON
    DEAK, P
    SNYDER, LC
    CORBETT, JW
    [J]. PHYSICAL REVIEW B, 1988, 37 (12): : 6887 - 6892
  • [20] HYDROGEN-ACCEPTOR PAIRS IN SILICON - PAIRING EFFECT ON THE HYDROGEN VIBRATIONAL FREQUENCY
    DELEO, GG
    FOWLER, WB
    [J]. PHYSICAL REVIEW B, 1985, 31 (10): : 6861 - 6864