OXYGEN DESORPTION FROM MOLYBDENUM OXIDE BY SYNCHROTRON RADIATION AND ITS SURFACE-CLEANING APPLICATIONS

被引：5

作者：

NAGASE, M

UTSUMI, Y

AKAWAZA, H

URISU, T

机构：

[1] NTT LSI Laboratories, 3-1 Morinosato Wakamiya, Atsugi

来源：

APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 03期

关键词：

D O I：

10.1063/1.108975

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The effects of synchrotron radiation (SR) irradiation on molybdenum oxide are studied. Removal of native molybdenum oxide by SR irradiation is observed by reflection high-energy electron diffraction and Auger-electron spectroscopy measurements. SR irradiation changes MoO3 thin films to MoO2. Indications are that SR-stimulated oxygen desorption is the cause. Those SR-irradiated molybdenum surfaces which are originally covered with native oxide are found to be highly reactive with disilane gas, while nonirradiated surfaces are not.

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页码：234 / 236

页数：3

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