A SUBSTRATE-PLATE TRENCH-CAPACITOR (SPT) MEMORY CELL FOR DYNAMIC RAMS

被引：28

作者：

LU, NCC ^{[1
]}

COTTRELL, PE ^{[1
]}

CRAIG, WJ ^{[1
]}

DASH, S ^{[1
]}

CRITCHLOW, DL ^{[1
]}

MOHLER, RL ^{[1
]}

MACHESNEY, BJ ^{[1
]}

NING, TH ^{[1
]}

NOBLE, WP ^{[1
]}

PARENT, RM ^{[1
]}

SCHEUERLEIN, RE ^{[1
]}

SPROGIS, EJ ^{[1
]}

TERMAN, LM ^{[1
]}

机构：

[1] IBM CORP,DIV GEN TECHNOL,ESSEX JUNCTION,VT 05452

来源：

关键词：

D O I：

10.1109/JSSC.1986.1052587

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：627 / 634

页数：8

共 17 条

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