DEPOSITION OF COMPOUND SEMICONDUCTORS IN HIGH VACUUM

被引：6

作者：

FRELLER, H

GUNTHER, KG

机构：

来源：

THIN SOLID FILMS | 1969年 / 3卷 / 06期

关键词：

D O I：

10.1016/0040-6090(69)90057-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：417 / +

页数：1

共 43 条

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