PROPERTIES OF ZRNX PREPARED BY ION-ASSISTED DEPOSITION

被引：43

作者：

NETTERFIELD, RP ^{[1
]}

MARTIN, PJ ^{[1
]}

MCKENZIE, DR ^{[1
]}

机构：

[1] UNIV SYDNEY,SCH PHYS,SYDNEY,NSW 2006,AUSTRALIA

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1990年 / 9卷 / 08期

关键词：

D O I：

10.1007/BF00722192

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：972 / 974

页数：3

共 17 条

[1] ION-STIMULATED SORPTION - AN ION-ASSISTED TECHNOLOGY WITH NEW POSSIBILITIES
GRIGOROV, GI
MARTEV, IN
[J]. THIN SOLID FILMS, 1986, 143 (02) : 177 - 185
[2] Hofmann S., 1982, J TRACE MICROPROBE T, V1, P213
[3] Higher nitrides of hafnium, zirconium, and titanium synthesized by dual ion beam deposition
Johansson, B. O.
Hentzell, H. T. G.
Harper, J. M. E.
Cuomo, J. J.
[J]. JOURNAL OF MATERIALS RESEARCH, 1986, 1 (03) : 442 - 451
[4] ZIRCONIUM NITRIDE FILMS PREPARED BY CATHODIC ARC PLASMA DEPOSITION PROCESS
JOHNSON, PC
RANDHAWA, H
[J]. SURFACE & COATINGS TECHNOLOGY, 1987, 33 (1-4) : 53 - 62
[5] UBER EIN BRAUNES ZIRKONNITRID ZR3N4
JUZA, R
RABENAU, A
NITSCHKE, I
[J]. ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE, 1964, 332 (1-2): : 1 - 4
[6] OPTICAL-PROPERTIES OF CVD-COATED TIN, ZRN AND HFN
KARLSSON, B
SHIMSHOCK, RP
SERAPHIN, BO
HAYGARTH, JC
[J]. SOLAR ENERGY MATERIALS, 1983, 7 (04): : 401 - 411
[7] KARLSSON B, 1982, P SOC PHOTO-OPT INST, V324, P52, DOI 10.1117/12.933254
[8] SOME PROPERTIES OF ZIRCONIUM NITRIDE FORMED BY PLASMAS
KONUMA, M
MATSUMOTO, O
[J]. JOURNAL OF THE LESS-COMMON METALS, 1977, 56 (01): : 129 - 132
[9] CHARACTERIZATION OF GROWING THIN-FILMS BY INSITU ELLIPSOMETRY, SPECTRAL REFLECTANCE AND TRANSMITTANCE MEASUREMENTS, AND ION-SCATTERING SPECTROSCOPY
NETTERFIELD, RP
MARTIN, PJ
SAINTY, WG
DUFFY, RM
PACEY, CG
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1985, 56 (11) : 1995 - 2003
[10] GROWTH DYNAMICS OF ALUMINUM NITRIDE AND ALUMINUM-OXIDE THIN-FILMS SYNTHESIZED BY ION-ASSISTED DEPOSITION
NETTERFIELD, RP
MULLER, KH
MCKENZIE, DR
GOONAN, MJ
MARTIN, PJ
[J]. JOURNAL OF APPLIED PHYSICS, 1988, 63 (03) : 760 - 769

← 1 2 →