ION-STIMULATED SORPTION - AN ION-ASSISTED TECHNOLOGY WITH NEW POSSIBILITIES

[1] Auciello O., 1984, Ion Bombardment Modification of Surfaces: Fundamentals and Applications

[2] THE ACTIVATED REACTIVE EVAPORATION PROCESS - DEVELOPMENTS AND APPLICATIONS [J]. THIN SOLID FILMS, 1981, 80 (1-3) : 255 - 261

[3] ACTIVATED REACTIVE EVAPORATION PROCESS FOR HIGH RATE DEPOSITION OF COMPOUNDS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (06): : 1385 - &

[4] METASTABLE PHASE FORMATION IN ION-IMPLANTED METALS [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) : 11 - 19

[5] STIMULATION OF SORPTION ON METAL-FILMS BY MEANS OF RADIATION DEFECTS [J]. THIN SOLID FILMS, 1981, 76 (03) : 269 - 272

[6] OPTICALLY SELECTIVE COATINGS OF TI-N COMPOUNDS OBTAINED BY ION-STIMULATED SORPTION [J]. THIN SOLID FILMS, 1986, 137 (01) : 1 - 5

[7] THEORY OF GETTER PUMP EVALUATION - STICKING COEFFICIENTS OF COMMON GASES ON CONTINUOUSLY DEPOSITED GETTER FILMS [J]. VACUUM, 1983, 33 (03) : 139 - 148

[8] GRIGOROV GI, 1979, Patent No. 26460

[9] GRIGOROV GY, 1979, DOKL BOLG AKAD NAUK, V32, P1069

[10] TRANSMISSION ELECTRON-MICROSCOPY STUDIES OF TIC AND VC-TIC DEPOSITS PREPARED BY ACTIVATED REACTIVE EVAPORATION [J]. THIN SOLID FILMS, 1978, 54 (01) : 107 - 118

[1] Auciello O., 1984, Ion Bombardment Modification of Surfaces: Fundamentals and Applications

[2] THE ACTIVATED REACTIVE EVAPORATION PROCESS - DEVELOPMENTS AND APPLICATIONS [J]. THIN SOLID FILMS, 1981, 80 (1-3) : 255 - 261

[3] ACTIVATED REACTIVE EVAPORATION PROCESS FOR HIGH RATE DEPOSITION OF COMPOUNDS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (06): : 1385 - &

[4] METASTABLE PHASE FORMATION IN ION-IMPLANTED METALS [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) : 11 - 19

[5] STIMULATION OF SORPTION ON METAL-FILMS BY MEANS OF RADIATION DEFECTS [J]. THIN SOLID FILMS, 1981, 76 (03) : 269 - 272

[6] OPTICALLY SELECTIVE COATINGS OF TI-N COMPOUNDS OBTAINED BY ION-STIMULATED SORPTION [J]. THIN SOLID FILMS, 1986, 137 (01) : 1 - 5

[7] THEORY OF GETTER PUMP EVALUATION - STICKING COEFFICIENTS OF COMMON GASES ON CONTINUOUSLY DEPOSITED GETTER FILMS [J]. VACUUM, 1983, 33 (03) : 139 - 148

[8] GRIGOROV GI, 1979, Patent No. 26460

[9] GRIGOROV GY, 1979, DOKL BOLG AKAD NAUK, V32, P1069

[10] TRANSMISSION ELECTRON-MICROSCOPY STUDIES OF TIC AND VC-TIC DEPOSITS PREPARED BY ACTIVATED REACTIVE EVAPORATION [J]. THIN SOLID FILMS, 1978, 54 (01) : 107 - 118