TRANSMISSION ELECTRON-MICROSCOPY STUDIES OF TIC AND VC-TIC DEPOSITS PREPARED BY ACTIVATED REACTIVE EVAPORATION

被引:40
作者
JACOBSON, BE [1 ]
BUNSHAH, RF [1 ]
NIMMAGADDA, R [1 ]
机构
[1] UNIV CALIF LOS ANGELES,DEPT MAT,LOS ANGELES,CA 90025
关键词
D O I
10.1016/0040-6090(78)90281-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:107 / 118
页数:12
相关论文
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