学术探索
学术期刊
新闻热点
数据分析
智能评审

NON-BULK-LIKE PHYSICAL-PROPERTIES OF THIN-FILMS DUE TO ION-BOMBARDMENT DURING FILM GROWTH

被引：13
作者：
KAY, E
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期
关键词：
D O I：
10.1116/1.573907
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：462 / 463
页数：2
相关论文
共 5 条
[1]   EFFECT OF ION-BOMBARDMENT DURING DEPOSITION ON THE X-RAY MICROSTRUCTURE OF THIN SILVER FILMS [J].
HUANG, TC ;
LIM, G ;
PARMIGIANI, F ;
KAY, E .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2161-2166
[2]  
PARMIGIANI F, PHYS REV B
[3]   THE INFLUENCE OF DISCHARGE CURRENT ON THE INTRINSIC STRESS IN MO FILMS DEPOSITED USING CYLINDRICAL AND PLANAR MAGNETRON SPUTTERING SOURCES [J].
THORNTON, JA ;
HOFFMAN, DW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03) :576-579
[4]   MODEL OF BIAS SPUTTERING IN A DC-TRIODE CONFIGURATION APPLIED TO THE PRODUCTION OF PD FILMS [J].
ZIEMANN, P ;
KAY, E .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (03) :828-832
[5]  
ZIEMANN P, 1982, J VAC SCI TECHNOL, V21, P512
1