MODEL OF BIAS SPUTTERING IN A DC-TRIODE CONFIGURATION APPLIED TO THE PRODUCTION OF PD FILMS

被引：27

作者：

ZIEMANN, P

KAY, E

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 21卷 / 03期

关键词：

D O I：

10.1116/1.571831

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：828 / 832

页数：5

共 10 条

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[10] PROPOSED MODEL FOR COMPOSITION OF SPUTTERED MULTICOMPONENT THIN FILMS [J].

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