MODEL OF BIAS SPUTTERING APPLIED TO CONTROL OF NB FILM PROPERTIES

被引：11

作者：

KAY, E

HEIM, G

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1978年 / 49卷 / 09期

关键词：

D O I：

10.1063/1.325518

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4862 / 4867

页数：6

共 19 条

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[9] ION-IMPLANTATION DURING FILM GROWTH AND ITS EFFECT ON SUPERCONDUCTING PROPERTIES OF NIOBIUM [J].

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