EFFECTS OF DC SUBSTRATE BIAS ON PROPERTIES OF RF-SPUTTERED AMORPHOUS-GERMANIUM DITELLURIDE FILMS

被引：19

作者：

FAGEN, EA ^{[1
]}

NOWICKI, RS ^{[1
]}

SEGUIN, RW ^{[1
]}

机构：

[1] ENERGY CONVERSION DEVICES INC,TROY,MI 48084

来源：

关键词：

D O I：

10.1063/1.1663015

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：50 / 59

页数：10

共 25 条

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