SPUTTERING YIELDS FOR LOW ENERGY HE+-, KR+-, AND XE+-ION BOMBARDMENT

被引：333

作者：

ROSENBERG, D

WEHNER, GK

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1962年 / 33卷 / 05期

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D O I：

10.1063/1.1728843

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：1842 / &

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