REFRACTIVE-INDEX DISPERSION OF DIELECTRIC FILMS USED IN THE SEMICONDUCTOR INDUSTRY

被引：18

作者：

PLISKIN, WA

机构：

[1] IBM, Hopewell Junction, NY, USA, IBM, Hopewell Junction, NY, USA

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 11期

关键词：

D O I：

10.1149/1.2100295

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：2819 / 2826

页数：8

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