ULTRAVIOLET-LIGHT IRRADIATION OF A RADIO-FREQUENCY PLASMA APPLIED TO FLUOROPOLYMER SPUTTERING DEPOSITION

被引：21

作者：

SUGIMOTO, I

MIYAKE, S

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 05期

关键词：

D O I：

10.1063/1.341611

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2700 / 2705

页数：6

共 24 条

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