TRANSPORT-PROPERTIES OF HETEROSTRUCTURES BASED ON GASB, INAS AND INSB ON GAAS SUBSTRATES

被引:4
作者
UPPAL, PN
GILL, DM
SVENSSON, SP
COOKE, DC
机构
[1] Martin Marietta Laboratories, Baltimore, MD 21227-3898
关键词
D O I
10.1016/0022-0248(91)91052-C
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We have grown heterostructures based on low band-gap channels of Ga(x)In2-xSb (x = 0.5) and InAs(x)Sb1-x (x = 0.4-1) alloys, and characterized them using Hall measurements. For barrier layers, we used Al(x)In1-xSb (x = 1-0.5), with a composition chosen to be closely lattice matched to the channel layers, Ga(x)In1-xSb and InAs(x)Sb1-x. We also grew a Al(x)Ga1-xAs/GaAs(y)Sb1-y/GaAs pseudomorphic heterostructure, which is an analog of the In(x)Ga1-xAs pseudomorphic MODFET. In the case of Al(x)In1-xSb/Ga(x)In1-xSb and Al(x)In1-xSb/InAs(x)Sb1-x heterostructures, the barrier layers were undoped but we observed two-dimensional electron densities of about 7 x 10(11) to 2 x 10(12) cm-2 at 300 K. For the AlSb/InAs and Al0.7In0.3Sb/Ga0.7In0.3Sb heterostructures, the 300 K mobilities were 24,000 and 3000 cm2/V.s, respectively. Mobilities for the Al(x)In1-xSb/InAs(x)Sb1-x heterostructures were around 12,000 cm2/V.s. Hall measurements on the Al(x)Ga1-xAs/GaAs(y)Sb1-y/GaAs heterostructures indicated 2D electron densities of 3 x 10(12) cm-2 and mobilities of 3,000 cm2/V.s. These results indicate the potential of the Al(x)In1-xSb/InAs(x)Sb1-x (x = 0.4) heterostructures to be used as high-speed MODFETs and of the Al(x)Ga1-xAs/GaAs(y)Sb1-y/GaAs heterostructures to be used as power MODFETs.
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页码:623 / 627
页数:5
相关论文
共 6 条
  • [1] CASEY HC, 1978, HETEROSTRUCTURE LA B
  • [2] Lester L. F., 1988, International Electron Devices Meeting. Technical Digest (IEEE Cat. No.88CH2528-8), P172, DOI 10.1109/IEDM.1988.32782
  • [3] HETEROJUNCTION FIELD-EFFECT TRANSISTORS BASED ON ALGASB/INAS
    LUO, LF
    BERESFORD, R
    WANG, WI
    MUNEKATA, H
    [J]. APPLIED PHYSICS LETTERS, 1989, 55 (08) : 789 - 791
  • [4] MICROWAVE PERFORMANCE OF A1INAS-GAINAS HEMTS WITH 0.2-MU-M AND 0.1-MU-M GATE LENGTH
    MISHRA, UK
    BROWN, AS
    ROSENBAUM, SE
    HOOPER, CE
    PIERCE, MW
    DELANEY, MJ
    VAUGHN, S
    WHITE, K
    [J]. IEEE ELECTRON DEVICE LETTERS, 1988, 9 (12) : 647 - 649
  • [5] EFFECTS OF INTERFACE LAYER SEQUENCING ON THE TRANSPORT-PROPERTIES OF INAS/ALSB QUANTUM-WELLS - EVIDENCE FOR ANTISITE DONORS AT THE INAS/ALSB INTERFACE
    TUTTLE, G
    KROEMER, H
    ENGLISH, JH
    [J]. JOURNAL OF APPLIED PHYSICS, 1990, 67 (06) : 3032 - 3037
  • [6] ON THE CARRIER PROFILING OF GAASSB/GAAS HETEROSTRUCTURES
    ZHAO, JH
    LI, AZ
    SCHLESINGER, TE
    MILNES, AG
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 1988, 17 (03) : 255 - 261