VOLATILE METALLOORGANIC PRECURSORS FOR DEPOSITING INORGANIC ELECTRONIC MATERIALS

被引:89
作者
BRADLEY, DC
机构
[1] Department of Chemistry, Queen Mary and Westfield College, London, E1 4NS, Mile End Road
关键词
D O I
10.1016/S0277-5387(00)80248-X
中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
摘要
[No abstract available]
引用
收藏
页码:1111 / 1121
页数:11
相关论文
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