MOVPE GROWTH OF INP USING ISOBUTYLPHOSPHINE AND TERT-BUTYLPHOSPHINE

被引:87
作者
CHEN, CH
LARSEN, CA
STRINGFELLOW, GB
BROWN, DW
ROBERTSON, AJ
机构
[1] AMER CYANAMID CO,DIV CHEM RES,DISCOVERY RES DEPT,STAMFORD,CT 06904
[2] CYANAMID CANADA INC,WELLAND RES,NIAGARA FALLS,ONTARIO,CANADA
关键词
D O I
10.1016/0022-0248(86)90274-5
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:11 / 18
页数:8
相关论文
共 26 条
  • [1] HETEROEPITAXIAL INAS GROWN ON GAAS FROM TRIETHYLINDIUM AND ARSINE .2. ELECTRICAL PROPERTIES
    BALIGA, BJ
    GHANDI, SK
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (12) : 1646 - 1650
  • [2] GAAS1-XSBX GROWTH BY OMVPE
    CHERNG, MJ
    COHEN, RM
    STRINGFELLOW, GB
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 1984, 13 (05) : 799 - 813
  • [3] MOVPE GROWTH OF GAINASSB
    CHERNG, MJ
    JEN, HR
    LARSEN, CA
    STRINGFELLOW, GB
    LUNDT, H
    TAYLOR, PC
    [J]. JOURNAL OF CRYSTAL GROWTH, 1986, 77 (1-3) : 408 - 417
  • [4] CLOUGH RB, 1969, T METALL SOC AIME, V245, P583
  • [6] ORGANOMETALLIC VPE GROWTH OF GAAS1-YSBY USING TRIMETHYL ANTIMONY AND GA1-XINXAS USING TRIMETHYL ARSENIC
    COOPER, CB
    LUDOWISE, MJ
    AEBI, V
    MOON, RL
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 1980, 9 (02) : 299 - 309
  • [7] HIGH-PURITY GAAS PREPARED FROM TRIMETHYLGALLIUM AND ARSINE
    DAPKUS, PD
    MANASEVIT, HM
    HESS, KL
    LOW, TS
    STILLMAN, GE
    [J]. JOURNAL OF CRYSTAL GROWTH, 1981, 55 (01) : 10 - 23
  • [8] THE PHOSPHONOUS ACIDS AND THEIR DERIVATIVES
    FRANK, AW
    [J]. CHEMICAL REVIEWS, 1961, 61 (04) : 389 - 424
  • [9] PHOTOLUMINESCENCE OF ORGANOMETALLIC VAPOR-PHASE EPITAXIAL GALNAS
    FRY, KL
    KUO, CP
    COHEN, RM
    STRINGFELLOW, GB
    [J]. APPLIED PHYSICS LETTERS, 1985, 46 (10) : 955 - 957
  • [10] OMVPE GROWTH OF INP USING TMIN
    HSU, CC
    COHEN, RM
    STRINGFELLOW, GB
    [J]. JOURNAL OF CRYSTAL GROWTH, 1983, 63 (01) : 8 - 12