PREPARATION OF LARGE-AREA ELECTRON-TRANSPARENT SAMPLES FROM SILICON DEVICES

被引：4

作者：

DAS, G ^{[1
]}

ONEIL, NA ^{[1
]}

机构：

[1] IBM,SYST PROD DIV,E FISHKILL FACIL,HOPEWELL JUNCTION,NY 12533

来源：

关键词：

D O I：

10.1147/rd.181.0076

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

引用

页码：76 / 79

页数：4

共 6 条

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BOOKER, GR ;

STICKLER, R .

BOOKER, GR ;

STICKLER, R .

BRITISH JOURNAL OF APPLIED PHYSICS, 1962, 13 (09) :446-&

[3]

DAS G, 1968, 4 P EUR REG C EL MIC, P259

KEAST, DJ ;

WILSON, AD .

JOURNAL OF SCIENTIFIC INSTRUMENTS, 1966, 43 (08) :609-&

[5] MICROPLASMA BREAKDOWN AT STAIR-ROD DISLOCATIONS IN SILICON [J].

QUEISSER, HJ ;

GOETZBERGER, A .

PHILOSOPHICAL MAGAZINE, 1963, 8 (90) :1063-&

[6]

SMITH PJ, 1971, P ELECTRON MICROSCOP, P148