NONLOCAL ELECTRON KINETICS IN A LOW-PRESSURE INDUCTIVELY-COUPLED RADIOFREQUENCY DISCHARGE

被引：55

作者：

KOLOBOV, VI

BEALE, DF

MAHONEY, LJ

WENDT, AE

机构：

[1] Engineering Research Center for Plasma-Aided Manufacturing, University of Wisconsin-Madison, Madison

来源：

APPLIED PHYSICS LETTERS | 1994年 / 65卷 / 05期

关键词：

D O I：

10.1063/1.112290

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The Boltzmann equation for electrons is analyzed for a low-pressure inductively coupled rf discharge in argon driven by a planar coil. Spatially resolved probe measurements of the electron distribution function (EDF) indicate that the total energy of electrons is an argument of the EDF. Pressure dependence of the light emission distribution is explained on the basis of nonlocal electron kinetics.

引用

页码：537 / 539

页数：3

共 9 条

[1]

BEALE DA, IN PRESS J VAC SCI T

[2] ELECTRON ENERGY DISTRIBUTIONS IN STATIONARY DISCHARGES [J].