A ULSI 2-D CAPACITANCE SIMULATOR FOR COMPLEX STRUCTURES BASED ON ACTUAL PROCESSES

被引：15

作者：

FUKUDA, S ^{[1
]}

SHIGYO, N ^{[1
]}

KATO, K ^{[1
]}

NAKAMURA, S ^{[1
]}

机构：

[1] TOSHIBA CO LTD,CTR RES & DEV,KAWASAKI 210,JAPAN

来源：

IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS | 1990年 / 9卷 / 01期

关键词：

D O I：

10.1109/43.45855

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

A two-dimensional (2-D) capacitance simulator using an improved boundary element method (BEM) is described. The capacitance simulator was linked with a topography/process simulator to estimate the distributed capacitances of complex structures based on actual processes. The utilization of a linear discontinuous element as the shape function is proposed in order to deal with multiregional problems by BEM. Other new techniques employed in the simulation program are also described, which enable precise calculation within practical CPU time. The calculated capacitances show good agreement with the experimental results. © 1990 IEEE

引用

页码：39 / 47

页数：9

共 17 条

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[2]

Brebbia C.A., 1984, BOUNDARY ELEMENT TEC

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