MODULATED PHOTOTHERMAL REFLECTANCE ON POROUS SILICON

被引：7

作者：

AMATO, G

BOARINO, L

BENEDETTO, G

SPAGNOLO, R

机构：

[1] Istituto Elettrotecnico Nazionale Galileo Ferraris, I-10135 Torino

来源：

THIN SOLID FILMS | 1995年 / 255卷 / 1-2期

关键词：

LASER IRRADIATION; LUMINESCENCE; SILICON;

D O I：

10.1016/0040-6090(94)05633-O

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this paper we present for the first time results of the application of the modulated photothermal reflectance technique to porous silicon (PS) samples with various degrees of porosity obtained by means of electrochemical dissolution of p(-) and p(+) c-Si substrates. Frequency scans yield results which are strongly related to the thermal conductivity, carrier lifetime and surface recombination velocity of PS. A model accounting for these effects has been developed in order to yield a quantitative evaluation of parameters which are of capital importance in both the physics and technology of PS.

引用

页码：111 / 114

页数：4

共 6 条

[1] TIME AND TEMPERATURE EVOLUTION OF LIGHT-EMISSION FROM POROUS SILICON PREPARED FROM P(-) AND P(+) SUBSTRATES [J].