ION IMPLANT MONITORING WITH THERMAL WAVE TECHNOLOGY

被引：116

作者：

SMITH, WL

ROSENCWAIG, A

WILLENBORG, DL

机构：

来源：

APPLIED PHYSICS LETTERS | 1985年 / 47卷 / 06期

关键词：

D O I：

10.1063/1.96079

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：584 / 586

页数：3

共 15 条

[1] PICOSECOND ELLIPSOMETRY OF TRANSIENT ELECTRON-HOLE PLASMAS IN GERMANIUM [J].

AUSTON, DH ;

SHANK, CV .

PHYSICAL REVIEW LETTERS, 1974, 32 (20) :1120-1123

[2]

CARDONA M, 1969, MODULATION SPECTROSC, P117

[3]

HERR D, UNPUB

[4] PICOSECOND TIME-RESOLVED PLASMA AND TEMPERATURE-INDUCED CHANGES OF REFLECTIVITY AND TRANSMISSION IN SILICON [J].

LIU, JM ;

KURZ, H ;

BLOEMBERGEN, N .

APPLIED PHYSICS LETTERS, 1982, 41 (07) :643-646

[5] THERMAL-WAVE DETECTION AND THIN-FILM THICKNESS MEASUREMENTS WITH LASER-BEAM DEFLECTION [J].

OPSAL, J ;

ROSENCWAIG, A ;

WILLENBORG, DL .

APPLIED OPTICS, 1983, 22 (20) :3169-3176

[6]

OPSAL J, 1985, B AM PHYS SOC, V30, P374

[7] THERMAL-WAVE IMAGING [J].

ROSENCWAIG, A .

SCIENCE, 1982, 218 (4569) :223-228

[8] THIN-FILM THICKNESS MEASUREMENTS WITH THERMAL WAVES [J].

ROSENCWAIG, A ;

OPSAL, J ;

WILLENBORG, DL .

APPLIED PHYSICS LETTERS, 1983, 43 (02) :166-168

[9]

Rosencwaig A., 1980, PHOTOACOUSTICS PHOTO

[10]

ROSENEWAIG A, 1985, B AM SOC, V30, P375

← 1 2 →