HIGH COERCIVITY CO-MN MODIFIED GAMMA-FE2O3 THIN-FILMS FOR HIGH-DENSITY RECORDING

被引:12
作者
CHANG, WD
CHIN, TS
DENG, MC
机构
[1] Department of Materials Science & Engineering, Tsing Hua University, Hsinchu
关键词
D O I
10.1109/20.281268
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
(Co,Mn) modified gamma-Fe2O3 thin films with an in-plane coercivity of 2200 to 4000 Oe, a saturation magnetization of 150 to 310 emu/cm(3), and a squareness ratio of 0.6 to 0.83 were prepared by DC-reactive magnetron sputtering. The films were deposited onto Si(100) and Corning #7059 glass substrates in an O-2/Ar atmosphere by using alloy composite targets. Composition adjustment, reduction-oxidation and postannealing treatments were found to affect coercivity as well as other magnetic properties in different extents. Owing to their sound magnetic performance, these films are promising for applications in high density magnetic recording.
引用
收藏
页码:3682 / 3684
页数:3
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