INFRARED SPECTROSCOPIC STUDY OF GEOX FILMS

被引：33

作者：

JISHIASHVILI, DA

KUTELIA, ER

机构：

[1] V.I. Lenin Georgian Polytechnic Institute, Republican Centre of Electron Microscopy, Lenin Str. 77, 380075 Tbilisi, Georgia

来源：

PHYSICA STATUS SOLIDI B-BASIC RESEARCH | 1987年 / 143卷 / 02期

关键词：

D O I：

10.1002/pssb.2221430253

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Spectroscopic analysis

引用

页码：K147 / K150

页数：4

共 10 条

[1] VIBRATIONAL PROPERTIES OF DISORDERED SYSTEMS - NUMERICAL STUDIES [J].

DEAN, P .

REVIEWS OF MODERN PHYSICS, 1972, 44 (02) :127-+

[2]

FELTZ A, 1983, AMORPHE GLASARTIGE A

[3] CHEMICAL-BOND AND RELATED PROPERTIES OF SIO2 .7. STRUCTURE AND ELECTRONIC PROPERTIES OF THE SIOX REGION OF SI-SIO2 INTERFACES [J].

HUBNER, K .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1980, 61 (02) :665-673

[4]

JISHIASHVILI DA, IN PRESS

[5] DIFFERENCES BETWEEN THE BONDING OF OXYGEN IN GLOW-DISCHARGE DEPOSITED A-SI-H AND A-GE-H [J].

LUCOVSKY, G ;

CHAO, SS ;

YANG, J ;

TYLER, JE ;

CZUBATYJ, W .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1984, 66 (1-2) :99-104

[6]

NAKHODKIN NT, 1986, POVERKHNSOT FIZ KHIM, P48

[7]

PACL Z, 1971, COLLECT CZECHOSLOVAK, V36, P1589

[8] INFRARED SPECTROSCOPIC STUDY OF SIOX FILMS PRODUCED BY PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION [J].

PAI, PG ;

CHAO, SS ;

TAKAGI, Y ;

LUCOVSKY, G .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :689-694

[9]

SCHUMANN L, 1982, PHYS STAT SOL B, V110, pK65

[10] XPS STUDY ON A-GEOX (1.3 LESS-THAN X LESS-THAN 2) FILMS PREPARED FROM GEO2 [J].

TAKANO, Y ;

TANDOH, Y ;

OZAKI, H ;

MORI, N .

PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1985, 130 (02) :431-436

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