FORMATION OF A PN JUNCTION ON AN ANISOTROPICALLY ETCHED GAAS SURFACE USING METALORGANIC CHEMICAL VAPOR-DEPOSITION

被引:4
作者
LEON, RP
BAILEY, SG
MAZARIS, GA
WILLIAMS, WD
机构
关键词
D O I
10.1063/1.97491
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:945 / 947
页数:3
相关论文
共 12 条
[1]   CHEMICAL ETCHING CHARACTERISTICS OF (001)GAAS [J].
ADACHI, S ;
OE, K .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (12) :2427-2435
[2]  
ARNDT RA, 1973, 11TH PHOT SPEC C, P40
[3]  
FAHRENBRUCH AL, 1983, FUNDAMENTALS SOLAR C
[4]  
Fonash S.J., 1981, SOLAR CELL DEVICE PH
[5]  
FONASH SJ, 1985, SOLID STATE TECHNOL, V28, P150
[6]  
HOLM PM, 1984, 17TH IEEE PHOT SPEC, P921
[7]   CHARGE COLLECTION SCANNING ELECTRON-MICROSCOPY [J].
LEAMY, HJ .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (06) :R51-R80
[8]  
PANG SW, 1984, SOLID STATE TECHNOL, V27, P249
[9]   DEPOSITION OF GAAS EPITAXIAL LAYERS BY ORGANOMETALLIC CVD - TEMPERATURE AND ORIENTATION DEPENDENCE [J].
REEP, DH ;
GHANDHI, SK .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (03) :675-680
[10]   THE DESIGN OF ANISOTROPICALLY ETCHED-III-V SOLAR-CELLS [J].
ROEDEL, RJ ;
HOLM, PM .
SOLAR CELLS, 1984, 11 (03) :221-239