THE EFFECT OF ADDED ACETYLENE ON THE RF DISCHARGE CHEMISTRY OF C2F6 - A MECHANISTIC MODEL FOR FLUOROCARBON PLASMAS

被引：30

作者：

TRUESDALE, EA

SMOLINSKY, G

MAYER, TM

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 05期

关键词：

D O I：

10.1063/1.327961

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2909 / 2913

页数：5

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