MICROMACHINED BEAM-DIAPHRAGM STRUCTURE IMPROVES PERFORMANCES OF PRESSURE TRANSDUCER

被引：34

作者：

BAO, MH

YU, LZ

WANG, Y

机构：

[1] Department of Electronic Engineering, Fudan University, Shanghai

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1990年 / 21卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(90)85026-Z

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Described in this paper is a novel beam-diaphragm structure which has the advantages of high sensitivity and good linearity like the island-diaphragm structures which appeared in the 1980s. Furthermore, it improves on almost all other performances and also has better process controllability. Results of finite element analysis and experimental data are also presented. © 1990.

引用

页码：137 / 141

页数：5

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