SPUTTERING OF CHEMISORBED NITROGEN FROM SINGLE-CRYSTAL PLANES OF TUNGSTEN AND MOLYBDENUM

被引：36

作者：

WINTERS, HF ^{[1
]}

TAGLAUER, E ^{[1
]}

机构：

[1] MAX PLANCK INST PLASMA PHYS,EURATOM ASSOC,D-8046 GARCHING,FED REP GER

来源：

PHYSICAL REVIEW B | 1987年 / 35卷 / 05期

关键词：

D O I：

10.1103/PhysRevB.35.2174

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：2174 / 2187

页数：14

共 50 条

[1] TRAPPING, STICKING AND REACTIVE SCATTERING IN CHEMISORPTION - NITROGEN ISOTOPES ON W(100) [J].

ALNOT, P ;

KING, DA .

SURFACE SCIENCE, 1983, 126 (1-3) :359-367

[2]

Andersen H. H., 1981, Sputtering by particle bombardment I. Physical sputtering of single-element solids, P145

[3] TEMPERATURE DEPENDENCE OF AG/CU SPUTTERING RATIO FOR EUTECTIC [J].

ANDERSON, GS .

JOURNAL OF APPLIED PHYSICS, 1969, 40 (07) :2884-&

[4] PREFERENTIAL SPUTTERING OF SI3N4 [J].

BHATTACHARYA, RS ;

HOLLOWAY, PH .

APPLIED PHYSICS LETTERS, 1981, 38 (07) :545-546

[5]

Bottiger J., 1971, Radiation Effects, V11, P69, DOI 10.1080/00337577108230451

[6] EFFECT OF ELEVATED TEMPERATURES ON SPUTTERING YIELDS [J].

CARLSTON, CE ;

MAGNUSON, GD ;

COMEAUX, A ;

MAHADEVAN, P .

PHYSICAL REVIEW, 1965, 138 (3A) :A759-+

[7] INTERACTION OF N2 WITH (100) W [J].

CLAVENNA, LR ;

SCHMIDT, LD .

SURFACE SCIENCE, 1970, 22 (02) :365-+

[8] INFLUENCE OF ION SPUTTERING ON THE ELEMENTAL ANALYSIS OF SOLID-SURFACES [J].

COBURN, JW .

THIN SOLID FILMS, 1979, 64 (03) :371-382

[9] SPUTTERING OF THE GALLIUM-INDIUM EUTECTIC ALLOY IN THE LIQUID-PHASE [J].

DUMKE, MF ;

TOMBRELLO, TA ;

WELLER, RA ;

HOUSLEY, RM ;

CIRLIN, EH .

SURFACE SCIENCE, 1983, 124 (2-3) :407-422

[10] LEED STUDIES OF ADSORPTION SYSTEMS W(100)+N2 AND W(100)+N2+CO [J].

ESTRUP, PJ ;

ANDERSON, J .

JOURNAL OF CHEMICAL PHYSICS, 1967, 46 (02) :567-+

← 1 2 3 4 5 →