X-RAY DETERMINATION OF STRESSES IN THIN-FILMS AND SUBSTRATES BY AUTOMATIC BRAGG ANGLE CONTROL

被引：68

作者：

ROZGONYI, GA ^{[1
]}

CIESIELK.TJ ^{[1
]}

机构：

[1] BELL TEL LABS,MURRAY HILL,NJ 07974

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1973年 / 44卷 / 08期

关键词：

D O I：

10.1063/1.1686299

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：1053 / 1057

页数：5

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