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DEPTH RESOLUTION DEGRADATION OF SPUTTER-PROFILED INP-INXGA1-XASYP1-Y INTERFACES CAUSED BY CONE FORMATION

被引：28
作者：
WILLIAMS, RS
NELSON, RJ
SCHLIER, AR
机构：
来源：
APPLIED PHYSICS LETTERS | 1980年 / 36卷 / 10期
关键词：
D O I：
10.1063/1.91332
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：827 / 829
页数：3
相关论文
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    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 121 - 127
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    [J]. SURFACE SCIENCE, 1978, 76 (01) : 130 - 147
  • [8] NEAR-EQUILIBRIUM LPE GROWTH OF LOW THRESHOLD CURRENT-DENSITY IN 1-XGAXASYP1-Y (LAMBDA = 1.35-MU) DH LASERS
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  • [9] WILLIAMS RS, UNPUBLISHED
  • [10] Wilson I. H., 1973, Radiation Effects, V18, P95, DOI 10.1080/00337577308234723
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