A STUDY OF BSE SIGNALS OF DOUBLE-LAYERS ON SUBSTRATES AT VARIOUS DETECTOR TAKE-OFF ANGLES

被引：5

作者：

HEJNA, J

机构：

[1] Institute of Electron Technology, Technical University of Wroctaw, Wroctaw

来源：

SCANNING | 1992年 / 14卷 / 05期

关键词：

D O I：

10.1002/sca.4950140503

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

[No abstract available]

引用

页码：256 / 261

页数：6

共 14 条

[1] THEORETICAL PREDICTION OF THE ELECTRON BACKSCATTERING COEFFICIENT FOR MULTILAYER STRUCTURES [J].

AUGUST, HJ ;

WERNISCH, J .

JOURNAL OF MICROSCOPY-OXFORD, 1990, 157 :247-254

[2] MULTIPLE SCATTERING OF 5-30 KEV ELECTRONS IN EVAPORATED METAL FILMS .2. RANGE-ENERGY RELATIONS [J].

COSSLETT, VE ;

THOMAS, RN .

BRITISH JOURNAL OF APPLIED PHYSICS, 1964, 15 (11) :1283-&

[3]

HEJNA J, 1987, SCANNING MICROSCOPY, V1, P983

[4]

HOHN FJ, 1976, OPTIK, V46, P491

[5] A STUDY OF ELECTRON BACKSCATTERING OF THIN-FILMS ON SUBSTRATES [J].

HUNGER, HJ ;

ROGASCHEWSKI, S .

SCANNING, 1986, 8 (06) :257-263

[6] A MONTE-CARLO CALCULATION OF THE BACKSCATTERING COEFFICIENT FOR A MULTILAYER SAMPLE [J].

LY, TD ;

HOWITT, DG .

SCANNING, 1992, 14 (01) :11-15

[7] MEASUREMENTS OF THE BACKSCATTERING OF 20 KEV TO 60 KEV ELECTRONS FROM DOUBLE-LAYERS AT VARIOUS ANGLES OF INCIDENCE [J].

NEUBERT, G ;

ROGASCHEWSKI, S .

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1985, 87 (02) :451-457

[8]

Niedrig H., 1978, Scanning Electron Microscopy, 1978, P841

[9] ELECTRON BACKSCATTERING FROM THIN-FILMS [J].

NIEDRIG, H .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (04) :R15-R49

[10] A SIMPLE METHOD FOR THE DETERMINATION OF FILM THICKNESS FROM ELECTRON IMAGE-CONTRAST IN A SCANNING ELECTRON-MICROSCOPE [J].

RAJORA, OS ;

CURZON, AE .

THIN SOLID FILMS, 1985, 123 (03) :235-238

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