CAPSS - A THIN DIAPHRAGM CAPACITIVE PRESSURE SENSOR SIMULATOR

被引：27

作者：

BIN, TY ^{[1
]}

HUANG, RS ^{[1
]}

机构：

[1] NATL TSING HUA UNIV,DEPT ELECT ENGN,HSINCHU 300,TAIWAN

来源：

SENSORS AND ACTUATORS | 1987年 / 11卷 / 01期

关键词：

COMPUTER AIDED DESIGN - DIAPHRAGMS - ELECTRODES - SEMICONDUCTING SILICON - Applications - SENSORS - Computer Simulation;

D O I：

10.1016/0250-6874(87)85001-1

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A set of analytical equations for the calculation of two-dimensional thin diaphragm deflection under pressure is derived. Based on these equations, a design simulation programme capable of calculating the device performance is developed. The simulated results for sensors fabricated on (100) silicon wafer are presented. A new technique to linearize the pressure sensitivity by electrode shaping is also proposed.

引用

页码：1 / 22

页数：22

共 11 条

[1] PRESSURE SENSITIVITY IN ANISOTROPICALLY ETCHED THIN-DIAPHRAGM PRESSURE SENSORS [J].