CHARACTERIZATION OF NICKEL FILMS DEPOSITED BY COLD REMOTE NITROGEN PLASMA ON ACRYLONITRILE-BUTADIENE-STYRENE COPOLYMER

被引:20
作者
BROCHERIEUX, A
DESSAUX, O
GOUDMAND, P
GENGEMBRE, L
GRIMBLOT, J
BRUNEL, M
LAZZARONI, R
机构
[1] UNIV SCI & TECH LILLE FLANDRES ARTOIS,PHYSICOCHIM ENERGET & PLASMAS LAB,EA MRES 1761,F-59655 VILLENEUVE DASCQ,FRANCE
[2] UNIV SCI & TECH LILLE FLANDRES ARTOIS,CATALYSE HETEROGENE & HOMOGENE LAB,CNRS,URA D04020,F-59655 VILLENEUVE DASCQ,FRANCE
[3] CNRS,CRISTALLOG LAB,F-38042 GRENOBLE,FRANCE
[4] UNIV MONS HAINAUT,SERV CHIM MAT NOUVEAUX,B-7000 MONS,BELGIUM
关键词
D O I
10.1016/0169-4332(95)00066-6
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Cold remote nitrogen plasma (CRNP) is used to deposit nickel films from Ni(CO)(4) on an acrylonitrile-butadiene-styrene (ABS) copolymer at room temperature in a primary vacuum system. An XPS study has been realized ex-situ and in three steps: (1) the analysis of the ABS pre-treatment by CRNP, (2) the analysis of the pre-treatment followed by the metallization and the plasma post-treatment and (3) the influence of the post-treatment on the deposited films. During the ABS pre-treatment, in order to enhance the nickel adhesion, nitrogen from plasma creates functionalities on the polymer surface and the oxygen presence is strengthened on the surface. During the metallization, the plasma decomposes Ni(CO)(4) vapor, leading to the nickel deposition on the ABS. The plasma post-treatment cleans the surface of the Ni film. The contaminants rate induced by the process itself is low. The conductive and adhesive properties of this nickel film coated on ABS allow a copper overlayer to be deposited by electrolysis in an acid bath. A structural and morphological observation by SEM, X-ray diffraction in glancing incidence, X-ray reflectometry and atomic force microscopy completes the film description.
引用
收藏
页码:47 / 58
页数:12
相关论文
共 30 条
[1]   AFTERGLOW AND DECAYING PLASMA CVD SYSTEMS [J].
BARDOS, L .
VACUUM, 1988, 38 (8-10) :637-642
[2]   XPS CHARACTERIZATION OF NI AND MO OXIDES BEFORE AND AFTER INSITU TREATMENTS [J].
BIANCHI, CL ;
CATTANIA, MG ;
VILLA, P .
APPLIED SURFACE SCIENCE, 1993, 70-1 (1 -4 pt A) :211-216
[3]   DENSITY OF AS-DEPOSITED AND ANNEALED THIN SILICON-NITRIDE FILMS [J].
BRUYERE, JC ;
SAVALL, C ;
REYNES, B ;
BRUNEL, M ;
ORTEGA, L .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1993, 26 (04) :713-716
[4]   ELECTRON SPECTROSCOPIC STUDY OF OXYGEN-PLASMA-TREATED POLYMER SURFACES [J].
BURKSTRAND, JM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (02) :223-226
[5]   UPS AND XPS STUDY OF THE POLYMER METAL INTERFACE OF POLY(2-METHYL-2-PROPENENITRILE) ELECTROPOLYMERIZED ON AN OXIDIZED NICKEL SURFACE CATHODE [J].
DENIAU, G ;
VIEL, P ;
LECAYON, G ;
DELHALLE, J .
SURFACE AND INTERFACE ANALYSIS, 1992, 18 (06) :443-447
[6]  
DESSAUX O, 1991, Patent No. 4020573
[7]   DEPOSITION OF THIN METAL AND METAL SILICIDE FILMS FROM THE DECOMPOSITION OF ORGANOMETALLIC COMPOUNDS [J].
DOWBEN, PA ;
SPENCER, JT ;
STAUF, GT .
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1989, 2 (04) :297-323
[8]   NITROGEN PLASMA TREATMENT OF POLYETHYLENE AND POLYSTYRENE IN A REMOTE PLASMA REACTOR [J].
FOERCH, R ;
MCINTYRE, NS ;
SODHI, RNS ;
HUNTER, DH .
JOURNAL OF APPLIED POLYMER SCIENCE, 1990, 40 (11-12) :1903-1915
[9]  
Foerch R., 1989, VIDE COUCHES MINCES, V246, P213
[10]  
FUGGLE JC, 1977, HDB XRAY ULTRAVIOLET, P273