DEVELOPMENT OF A HIGH-CURRENT AND HIGH-ENERGY METAL-ION BEAM SYSTEM

被引：2

作者：

INAMI, H

INOUCHI, Y

TANAKA, H

YAMASHITA, T

MATSUNAGA, K

MATSUDA, K

机构：

[1] Nissin Electric Co., Ltd., Ukyo-ku, Kyoto, 615, 47, Umezu-Takase-cho

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1991年 / 55卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(91)96196-R

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A high current metal ion accelerating system, which consists of a metal vapor plasma ion source with a multicusp magnetic field and a single gap acceleration column, has been developed. The following results were obtained experimentally: (1) a 110 mA aluminum ion beam and a 95 mA chromium ion beam were extracted from the ion source, (2) the impurities contained in the beams were less than 1%, and (3) the aluminum ion beam was accelerated up to 90 keV at 50 mA on the target.

引用

页码：370 / 373

页数：4

共 9 条

[1] EFFECTS OF HEAT-TREATMENT AND IMPLANTATION OF ALUMINUM ON THE OXIDATION RESISTANCE OF FE-CR-AL-Y ALLOYS [J].

BERNABAI, U ;

CAVALLINI, M ;

BOMBARA, G ;

DEARNALEY, G ;

WILKINS, MA .

CORROSION SCIENCE, 1980, 20 (01) :19-&

[2] BROAD-BEAM MULTI-AMPERE METAL-ION SOURCE [J].

BROWN, IG ;

GALVIN, JE ;

MACGILL, RA ;

PAOLONI, FJ .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (01) :577-579

[3]

HIOKI T, 1986, 10TH P S ISIAT 86 TO, P547

[4] DEVELOPMENT OF HIGH-CURRENT METAL-ION BEAM SOURCE [J].

INAMI, H ;

FUKUMARU, F ;

INOUCHI, Y ;

SATO, D ;

TANAKA, K ;

MATSUNAGA, K .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 37-8 :198-200

[5] HIGH-CURRENT METAL-ION BEAM EXTRACTION FROM A MULTICUSP ION-SOURCE [J].

INOUCHI, Y ;

TANAKA, H ;

INAMI, H ;

FUKUMARU, F ;

MATSUNAGA, K .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (01) :538-540

[6]

Iwaki M., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P1793

[7]

Okabe Y., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P1811

[8]

SAKUDO N, 1985, 9TH P S ISIAT 85 TOK, P1

[9] HIGH-CURRENT ION-BEAMS OF METALLIC ELEMENTS [J].

TORP, B ;

NIELSEN, BR ;

RUCK, DM ;

EMIG, H ;

SPADTKE, P ;

WOLF, BH .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (01) :595-597

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