RADIATION EFFECTS AND ELECTRICAL STABILITY OF METAL-NITRIDE-OXIDE-SILICON STRUCTURES

被引：20

作者：

PERKINS, CW

AUBUCHON, KG

DILL, HG

机构：

来源：

APPLIED PHYSICS LETTERS | 1968年 / 12卷 / 11期

关键词：

D O I：

10.1063/1.1651866

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：385 / +

页数：1

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