SILICON PARTICLE GROWTH IN A FLUIDIZED-BED REACTOR

被引：48

作者：

HSU, G

ROHATGI, N

HOUSEMAN, J

机构：

[1] JPL, Padadena, CA, USA, JPL, Padadena, CA, USA

来源：

AICHE JOURNAL | 1987年 / 33卷 / 05期

关键词：

D O I：

10.1002/aic.690330511

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：784 / 791

页数：8

共 12 条

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[2]

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[3] FINES IN FLUIDIZED-BED SILANE PYROLYSIS [J].

HSU, G ;

HOGLE, R ;

ROHATGI, N ;

MORRISON, A .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (03) :660-663

[4]

HSU G, 1984, 17TH IEEE PHOT SPEC

[5]

HSU GC, 1985, OCT P FLAT PLAT SOL, P147

[6]

Kunii D., 1969, FLUIDIZATION ENG

[7]

LACKEY WJ, 1975, Patent No. 3889631

[8]

Levenspiel O., 1979, CHEM REACTOR OMNIBOO

[9] KINETICS AND MECHANISM OF THE SILANE DECOMPOSITION [J].

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ONEAL, HE ;

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LESKA, F ;

SHIPLEY, N .

INTERNATIONAL JOURNAL OF CHEMICAL KINETICS, 1979, 11 (11) :1167-1182

[10] PYROLYSIS OF MONOSILANE [J].

PURNELL, JH ;

WALSH, R .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1966, 293 (1435) :543-&

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